Semiconductor device having a plug for diffusing hydrogen into a

Details Semiconductor device having a plug for diffusing hydrogen into a Semiconductor device having a plug for diffusing hydrogen into a

1996-05-23

1999-02-02

Saadat, Mahshid D.

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

257754, H01L 2312, H01L 2348, H01L 2352, H01L 2940

Patent

active

058669469

ABSTRACT:
A semiconductor device formed on a semiconductor substrate includes a layer which is substantially a barrier to hydrogen formed on the semiconductor substrate. A plug, formed of a material through which hydrogen can diffuse, is disposed in an opening through the layer and contacts a surface of the semiconductor substrate. Hydrogen may be diffused into the semiconductor substrate through the plug.

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