Semiconductor device having a plated heat sink

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With provision for cooling the housing or its contents

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Details

257713, 257717, 257720, 361688, 361707, 361704, 361711, H01L 2334, H01L 2306, H01L 720

Patent

active

057264945

ABSTRACT:
A semiconductor device having a plated heat sink structure is provided, in which an Au layer (5) high in thermal expansion coefficient is formed on the lower surface of a GaAs substrate (1) having a source electrode (2), a gate electrode (3) and a drain electrode (4) of a field effect transistor on the upper surface, and, a W layer (6) low in thermal expansion coefficient is formed on the lower surface of the Au layer (5). Warping of the device after mounted on a package is reduced on the ground of such a plated heat sink structure.

REFERENCES:
patent: 5045503 (1991-09-01), Kobiki et al.
patent: 5144413 (1992-09-01), Adlerstein

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