Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With provision for cooling the housing or its contents
Patent
1997-02-27
1998-03-10
Whitehead, Carl W.
Active solid-state devices (e.g., transistors, solid-state diode
Housing or package
With provision for cooling the housing or its contents
257713, 257717, 257720, 361688, 361707, 361704, 361711, H01L 2334, H01L 2306, H01L 720
Patent
active
057264945
ABSTRACT:
A semiconductor device having a plated heat sink structure is provided, in which an Au layer (5) high in thermal expansion coefficient is formed on the lower surface of a GaAs substrate (1) having a source electrode (2), a gate electrode (3) and a drain electrode (4) of a field effect transistor on the upper surface, and, a W layer (6) low in thermal expansion coefficient is formed on the lower surface of the Au layer (5). Warping of the device after mounted on a package is reduced on the ground of such a plated heat sink structure.
REFERENCES:
patent: 5045503 (1991-09-01), Kobiki et al.
patent: 5144413 (1992-09-01), Adlerstein
Nashimoto Yasunobu
Tsutsui Hiroaki
NEC Corporation
Whitehead Carl W.
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