Semiconductor device having a pedestal

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means

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257510, 257377, H01L 2358

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active

058180982

ABSTRACT:
A graded-channel semiconductor device (10) is formed in a pedestal (12). The pedestal (12) is formed on a substrate (11) and improves the electrical characteristics of the device (10) compared to conventional device structures. The pedestal (12) has sides (13) that are bordered by a first dielectric layer (24) to provide electrical isolation. An interconnect structure (90) can be optionally formed in conjunction with the formation of the device (10). The interconnect structure (90) has a plurality of conductors (60, 97) that can be used to transport electrical signals across the device (10).

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K. Lee et al., "Room Temperature 0.1 .mu.m CMOS Technology with 11.8 ps Gate Delay," IEEE 1993, Washington, DC, pp. 131-134.

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