Semiconductor device having a metal conductor in ohmic...

Active solid-state devices (e.g. – transistors – solid-state diode – Regenerative type switching device – Combined with field effect transistor

Reexamination Certificate

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C257S134000, C257S136000

Reexamination Certificate

active

11138298

ABSTRACT:
A silicon carbide semiconductor device such as JFET, SIT and the like is provided for accomplishing a reduction in on-resistance and high-speed switching operations. In the JFET or SIT which turns on/off a current with a depletion layer extending in a channel between a gate region formed along trench grooves, a gate contact layer and a gate electrode, which can be supplied with voltages from the outside, are formed on one surface of a semiconductor substrate or on the bottom of the trench groove. A metal conductor (virtual gate electrode) is formed in ohmic contact with a p++ contact layer of the gate region on the bottom of the trench grooves independently of the gate electrode. The virtual gate electrode is electrically isolated from the gate electrode and an external wire.

REFERENCES:
patent: 4338618 (1982-07-01), Nishizawa
patent: 6917054 (2005-07-01), Onose et al.
patent: WO 95-18465 (1995-07-01), None
Materials Science Forum vols. 443-436 (2003) pp. 777-780.
IEEE Electron Device Letters vol. 24, No. 7, Jul. 2003, pp. 463-465.

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