Semiconductor device having a localized halo implant therein...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device

Reexamination Certificate

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Details

C257S327000, C257S336000, C257S344000, C438S301000, C438S302000, C438S305000

Reexamination Certificate

active

07038258

ABSTRACT:
The present invention provides a semiconductor device200having a localized halo implant250located therein, a method of manufacture therefore and an integrated circuit including the semiconductor device. In one embodiment, the semiconductor device200includes a gate244located over a substrate210, the substrate210having a source and a drain230located therein. In the same embodiment, located adjacent each of the source and drain230are localized halo implants250, each of the localized halo implants250having a vertical implant region260and an angled implant region265. Further, at an intersection of the vertical implant region260and the angled implant region265is an area of peak concentration.

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patent: 6124616 (2000-09-01), Dennison et al.
patent: 6194278 (2001-02-01), Rengarajan
patent: 6248635 (2001-06-01), Foote et al.
patent: 6362052 (2002-03-01), Rangarajan et al.
patent: 6518135 (2003-02-01), Ahn
patent: 2003/0148564 (2003-08-01), Chang
patent: 2003/0209758 (2003-11-01), Lee et al.
patent: 2004/0110351 (2004-06-01), Narasimha

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