Semiconductor device having a dummy pattern

Details Semiconductor device having a dummy pattern Semiconductor device having a dummy pattern

2007-07-10

2007-07-10

Weiss, Howard (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

C257S797000

Reexamination Certificate

active

11062489

ABSTRACT:
A semiconductor device includes a substrate, a circuit pattern formed on the substrate, and a plurality of dummy patterns formed on the substrate in addition to the circuit pattern, wherein the plurality of dummy patterns include a plurality of marker dummy patterns in an array thereof, the marker dummy patterns being distinguishable from other dummy patterns and are distributed irregularly in the array of the dummy patterns.

REFERENCES:
patent: 6060786 (2000-05-01), Wang
patent: 6133585 (2000-10-01), Murata
patent: 6314543 (2001-11-01), Yamaguchi
patent: 6486565 (2002-11-01), Miyako
patent: 6664642 (2003-12-01), Koubuchi et al.
patent: 6730931 (2004-05-01), Cleeves et al.
patent: 62-36821 (1987-02-01), None
patent: 9-306910 (1997-11-01), None
patent: 2003-133418 (2003-05-01), None
patent: 2003-142583 (2003-05-01), None

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