Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated...
Reexamination Certificate
2005-04-19
2005-04-19
Wilson, Allan R. (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
C257S500000, C257S501000, C257S502000, C257S504000, C257S506000
Reexamination Certificate
active
06882024
ABSTRACT:
A dummy active region is formed in which abrading processes are averaged. A semiconductor device is characterized in that an active region for forming an actual device, a device separation region being formed by a trench, and a dummy active region formed substantially in a rectangular shape are included, and the length of the short side of the dummy active region is less than 1 μm.
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Fenty Jesse A.
Oki Electric Industry Co. Ltd.
Wenderoth , Lind & Ponack, L.L.P.
Wilson Allan R.
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