Semiconductor device having a compressed device isolation...

Details Semiconductor device having a compressed device isolation... Semiconductor device having a compressed device isolation...

2011-08-02

2011-08-02

Smith, Zandra (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

C257S369000, C257S371000, C257S374000

Reexamination Certificate

active

07989912

ABSTRACT:
The semiconductor device includes a lower device isolation structure formed in a semiconductor substrate to define an active region. The lower device isolation structure has a first compressive stress. An upper device isolation structure is disposed over the lower device isolation structure. The upper device isolation structure has a second compressive stress greater than the first compressive stress. A gate structure is disposed over the active region between the neighboring upper device isolation structures.

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