Semiconductor device having a body of amorphous silicon

Details Semiconductor device having a body of amorphous silicon Semiconductor device having a body of amorphous silicon

1976-07-30

1977-12-20

Edlow, Martin H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

357 4, 357 15, 357 30, 357 58, 357 59, 427 39, 427248A, H01L 4500

Patent

active

040645215

ABSTRACT:
An amorphous silicon material, fabricated by the process of a glow discharge in silane, is utilized as the body of semiconductor devices.

REFERENCES:
patent: 3424661 (1969-01-01), Androshuk
patent: 3473959 (1969-10-01), Ehinger
patent: 3958262 (1976-05-01), Merrin
patent: 3978333 (1976-08-01), Crisman
Spear et al., Solid State Communications, vol. 17, Nov. 1, 1975, pp. 1193-1196.
Schneider, B.S.T.J., Nov. 1966, pp. 1611-1627.
Spear, Amorphous and Liquid Semiconductors, vol. I, pp. 1-11, Taylor & Francis, London, 1974.
Fuhs, Tetrahedrally Bonded Amorphous Semiconductors, p. 345 et. seq., American Inst. of Physics, 1974.
Mell, Amorphous and Liquid Semiconductors, vol. I, pp. 217-218.

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