Patent
1987-03-20
1989-10-17
Edlow, Martin H.
357 71, 357 80, 357 81, H01L 2348
Patent
active
048750883
ABSTRACT:
A semiconductor device includes a semicoonductor pellet, and a metal nitride film or a metal silicide film, each having conductivity and an anti-oxidation property, and being formed on one surface of the pellet to cause the surface to have a substantially uniform potential.
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Aoki Riichirou
Egawa Hidemitsu
Okumura Katsuya
Edlow Martin H.
Kabushiki Kaisha Toshiba
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