Semiconductor device contact registration structure

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...

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Details

257774, H01L 29786, H01L 2941

Patent

active

060283254

ABSTRACT:
An aluminum pattern is formed at the same time as a gate electrode, and anodic oxide films are formed on the surfaces of the aluminum pattern and the gate electrode. After an interlayer insulating film is formed, a contact hole is formed through it. Even if the contact hole is deviated from the intended position, there occurs no failure because of the existence of the aluminum pattern on which the anodic oxide film is formed.

REFERENCES:
patent: 5289030 (1994-02-01), Yamazaki et al.

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