Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate
2007-09-18
2007-09-18
El-Arini, Zeinab (Department: 1746)
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
C134S002000, C134S003000, C134S026000, C134S902000, C257SE21228
Reexamination Certificate
active
10685684
ABSTRACT:
The present invention provides a method for cleaning semiconductor devices through heterogeneous nucleation of cavitation bubbles. Heterogeneous nucleation is performed by applying sonic energy to a cleaning solution and a phase material in order to remove unwanted particles from semiconductor devices. A surfactant may be added to the phase material and the cleaning solution.
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Ramachandran Ravikumar
Rath David Lee
El-Arini Zeinab
Infineon - Technologies AG
Slater & Matsil L.L.P.
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