Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2005-11-08
2005-11-08
Nguyen, Ha (Department: 2812)
Semiconductor device manufacturing: process
With measuring or testing
Reexamination Certificate
active
06962827
ABSTRACT:
A plurality of semiconductor integrated circuits and a plurality of TEG circuits are aligned and provided on a substrate. In the TEG circuit, a built-in test circuit is provided in a region which faces a semiconductor integrated circuit across a dicing line region. The built-in test circuit and the semiconductor integrated circuit are connected by an interconnection which is provided on the dicing line region. The interconnection is cut for isolation into chips.
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Furue Katsuya
Furutani Kiyohiro
Kikuda Shigeru
Kono Takashi
Kuge Shigehiro
McDermott Will & Emery LLP
Nguyen Ha
Renesas Technology Corp.
Stevenson André
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