Semiconductor device and semiconductor wafer and a method...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Chip mounted on chip

Reexamination Certificate

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Details

C257S686000, C257S723000, C438S109000, C438S110000

Reexamination Certificate

active

07812457

ABSTRACT:
The semiconductor device1has a semiconductor chip10(first semiconductor chip) and a semiconductor chip20(second semiconductor chip). The semiconductor chip20is formed on the semiconductor chip10. The semiconductor chip20is constituted by comprising a semiconductor substrate22. The semiconductor substrate22, which is an SOI substrate, is constituted by comprising an insulating layer34, and a silicon layer36, which is provided on the insulating layer34, including a circuit forming region A1. The insulating layer34functions as a protective film (a first protective film) covering a lower face (a face opposite to the semiconductor chip10) of the circuit forming region A1. A protective film38(a second protective film) is provided on the semiconductor substrate22. The protective film38covers a side face of the circuit forming region A1.

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