Semiconductor device and semiconductor device manufacturing...

Details Semiconductor device and semiconductor device manufacturing... Semiconductor device and semiconductor device manufacturing...

2011-08-30

2011-08-30

Smith, Matthew (Department: 2823)

Semiconductor device manufacturing: process

Making passive device

Trench capacitor

C438S243000, C438S622000, C257SE21008, C257SE21648

Reexamination Certificate

active

08008159

ABSTRACT:
A semiconductor device includes: a first interlayer insulating film; a first conductive member provided lower than the first interlayer insulating film; a contact plug that penetrates through the first interlayer insulating film, and is electrically connected to the first conductive member, the contact plug including a small-diameter part, and a large-diameter part arranged on the small-diameter part, an outer diameter of the large-diameter part being larger than an outer diameter of the small-diameter part, and the outer diameter of the large-diameter part being larger than an outer diameter of a connection face between the second conductive member and the large-diameter part; and a second conductive member that is provided on the first interlayer insulating film, and is electrically connected to the contact plug.

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patent: 2005-167188 (2005-06-01), None

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