Semiconductor device and radiation detector employing it

Details Semiconductor device and radiation detector employing it Semiconductor device and radiation detector employing it

2004-02-24

2010-11-23

Andújar, Leonardo (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified configuration

C257SE21578

Reexamination Certificate

active

07838994

ABSTRACT:
A wiring substrate20, comprising a glass substrate, which is provided with through holes20c, each having a tapered part20dthat becomes large in opening area at the side of an input surface20a, and conductive members21, formed on the inner walls of through holes20c, is used. A semiconductor device5is arranged by connecting bump electrodes17, provided on an output surface15bof a PD array15in correspondence with conductive members21, to input portions21aof conductive members21formed on input surface20aof wiring substrate20. A radiation detector is arranged by connecting a scintillator10via an optical adhesive agent11to a light-incident surface15aof PD array15and connecting a signal processing element30via bump electrodes31to output surface20bof wiring substrate20. A semiconductor device, with which the semiconductor elements and the corresponding conductive paths of the wiring substrate are connected satisfactorily, and a radiation detector using this semiconductor device are thus provided.

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