Semiconductor device and production method therefor

Details Semiconductor device and production method therefor Semiconductor device and production method therefor

2006-07-11

2006-07-11

Dang, Trung (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

With means to control surface effects

Insulating coating

C257S637000, C977S726000

Reexamination Certificate

active

07075170

ABSTRACT:
The invention is characterized by attaining a lower dielectric constant and including an inorganic dielectric film which is formed on the surface of a substrate and has a cyclic porous structure having a pore ratio of 50% or higher.

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Yunfeng Lu et al. “Continuous formation of supported cubic and hexagonal mesoporous films by sol-gel dep-coating” Nature, 1997, vol., 389, pp. 364-368.
Alan Sellinger et al. “Continuous self-assembly of organic-inorganic nanocomposite coatings that mimic nacre” Nature, 1998, vol. 394, pp. 256-260.

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