Semiconductor device and process for fabricating the same

Details Semiconductor device and process for fabricating the same Semiconductor device and process for fabricating the same

1994-07-11

1997-11-11

Niebling, John

Fishing, trapping, and vermin destroying

437 51, H01L 21265

Patent

active

056863284

ABSTRACT:
A semiconductor device suitable for active-matrix addressed liquid crystal display device equipped with pixel electrodes and comprising a thin film transistor and a capacitor formed on the same insulation substrate, provided that said capacitor is formed from an oxide insulation film provided on the lower electrode and a silicon nitride film. Highly reliable thin film transistors and capacitors can be obtained.

REFERENCES:
patent: 5359206 (1994-10-01), Yamamoto et al.
patent: 5422293 (1995-06-01), Konya
patent: 5471329 (1995-11-01), Nakajima et al.
patent: 5485019 (1996-01-01), Yamazaki et al.
patent: 5521107 (1996-05-01), Yamazaki et al.

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