Semiconductor device and microwave process for its manufacture

Details Semiconductor device and microwave process for its manufacture Semiconductor device and microwave process for its manufacture

1991-12-13

1993-04-20

Weisstuch, Aaron

Fishing, trapping, and vermin destroying

437101, 437109, 437106, 437113, 427 74, 427575, 136258, 357 30, H01L 3118, H01L 21205

Patent

active

052042723

ABSTRACT:
Open circuit voltage of photovoltaic devices manufactured by a microwave deposition process is increased by disposing a bias wire in the microwave energized plasma and applying a positive voltage of approximately 100 volts to the wire during only a portion of the time in which the intrinsic semiconductor layer is being deposited.

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