Semiconductor device and method of manufacturing the same

Details Semiconductor device and method of manufacturing the same Semiconductor device and method of manufacturing the same

2007-04-27

2010-11-16

Garber, Charles D (Department: 2812)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C430S327000

Reexamination Certificate

active

07833912

ABSTRACT:
According to an aspect of the present invention, there is provided a semiconductor device including a semiconductor substrate which includes a number of chip areas, a processed film which is formed on the semiconductor substrate, and a ring-shaped pattern which is formed on the processed film and along a peripheral portion of the semiconductor substrate.

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