Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1987-11-12
1989-07-18
Griffin, Donald A.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
156643, 437 60, H01G 406, H01L 21306
Patent
active
048498548
ABSTRACT:
Two or three trenches are formed in a silicon substrate, and a conductive layer is formed in the silicon substrate facing the trenches. An oxide film for insulation is formed on a surface of the conductive layer facing the trenches. The trenches are filled with polysilicon, and the conductive layer and the polysilicon constitute a capacitor through the oxide film. Since this capacitor has two or three trenches, an effective area sufficiently large for increasing a capacitance value of the capacitor can be obtained without increasing the plane area of the device. The conductive layer and the polysilicon are connected to aluminum interconnection layers through a silicide layer, so as to be connected to other integrated circuits.
REFERENCES:
patent: 3962713 (1976-06-01), Kendall et al.
patent: 4473598 (1984-09-01), Ephrath et al.
patent: 4582565 (1986-04-01), Kawakatsu
patent: 4650544 (1987-03-01), Erb et al.
patent: 4704368 (1987-11-01), Goth et al.
patent: 4745081 (1988-05-01), Beyer et al.
Griffin Donald A.
Mitsubihsi Denki Kabushiki Kaisha
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