Semiconductor device and method of manufacturing the same

Fishing – trapping – and vermin destroying

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357 43, 148DIG9, H01L 2170

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050454935

ABSTRACT:
A semiconductor device such as a Bi-CMOS having vertical or lateral bipolar transistors and MOS transistors is disclosed. The MOS transistors include a gate electrode made of a first conductive thin film, and sidewall spacers formed on the sides of the gate electrode and consisting of at least one deposition film. The vertical bipolar transistors include an emitter electrode made of a second conductive thin film, and an emitter diffusion window formed in the deposition film which is disposed under the emitter electrode. The lateral bipolar transistors include a base width defining region for defining the base width, and an insulation film formed between the base width defining region and the collector and emitter, and consisting of the deposition film.

REFERENCES:
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patent: 4887142 (1989-12-01), Bertotti et al.
patent: 4921811 (1990-05-01), Watanabe et al.
patent: 4922318 (1990-05-01), Thomas et al.
patent: 4927776 (1990-05-01), Soejima
Patent Abstracts of Japan, vol. 12, No. 234 (E-630) [3086] Jul. 7, 1988, JP-A-63031156, (NEC Corp.), 9.2.1988.
European Patent Office Search Report for E.P. 90 10 7859, dated 14-8-1990.

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