Semiconductor device and method of manufacturing the...

Details Semiconductor device and method of manufacturing the... Semiconductor device and method of manufacturing the...

2009-04-01

2010-11-23

Pham, Thanh V (Department: 2894)

Semiconductor device manufacturing: process

Making passive device

Planar capacitor

C438S381000, C438S396000

Reexamination Certificate

active

07838382

ABSTRACT:
A method of manufacturing a semiconductor device includes forming a lower electrode on a semiconductor substrate, applying a photoresist on the lower electrode, forming an opening in the photoresist spaced from the periphery of the lower electrode, forming a high-dielectric constant film of a high-k material having a dielectric constant of 10 or more, performing liftoff so that the high-dielectric-constant film remains on the lower electrode, and forming an upper electrode on the high-dielectric-constant film remaining after the liftoff.

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patent: 11-145387 (1999-05-01), None
patent: 2004-152796 (2004-05-01), None

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