Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Reexamination Certificate
2008-12-10
2010-02-16
Ha, Nguyen T (Department: 2831)
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
C361S306100, C361S306300, C361S301400, C361S308300, C361S313000, C257S195000, C257S196000, C257S500000, C257S502000
Reexamination Certificate
active
07663861
ABSTRACT:
An MIM capacitance element (capacitance lower electrode, capacitance insulation film and capacitance upper electrode) is provided on a first insulation film on a semiconductor substrate. An interlayer insulation film is provided so as to cover the MIM capacitance element and flattened. The interlayer insulation film is provided with a first connection plug connected to the capacitance upper electrode, a first wiring layer, and a second wiring layer. A second insulation film is provided on the interlayer insulation film. The second insulation film is provided with first and second openings. A wiring pull-out portion which connects the first connection plug and the second wiring layer to each other is provided on the second insulation film.
REFERENCES:
patent: 5585655 (1996-12-01), Ota et al.
patent: 5923072 (1999-07-01), Wada et al.
patent: 6433441 (2002-08-01), Niwa et al.
patent: 6784533 (2004-08-01), Shimizu et al.
patent: 7202567 (2007-04-01), Kikuta et al.
patent: 7268303 (2007-09-01), Ashida
patent: 7348623 (2008-03-01), Akiyama
patent: 7417296 (2008-08-01), Akiyama
patent: 2002/0153554 (2002-10-01), Kajita et al.
patent: 2004/0099897 (2004-05-01), Tsutsue et al.
patent: 2006-310894 (2006-11-01), None
Ha Nguyen T
McDermott Will & Emery LLP
Panasonic Corporation
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