Semiconductor device and method of manufacturing same, as well a

Details Semiconductor device and method of manufacturing same, as well a Semiconductor device and method of manufacturing same, as well a

1982-02-05

1985-11-19

Tarcza, Thomas H.

Recorders

Printing, dotting, or punching marker

Ink transfer support or moving means

313422, G01D 1506

Patent

active

045545642

ABSTRACT:
The invention relates to a method for displaying a pattern on a resist using electron lithography. In particular, a cathode device having a matrix of semiconductor cathodes generates an electron beam which exposes a resist layer. The electron beam is generated by applying control signals to selected ones of the matrix of cathodes to cause electron emission therefrom.

REFERENCES:
patent: 2912592 (1959-11-01), Mayer
patent: 3363240 (1968-01-01), Cola et al.
patent: 3755704 (1973-08-01), Spindt et al.
patent: 3882355 (1975-05-01), De Witt
patent: 4325084 (1972-04-01), van Gorkom et al.

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