Semiconductor device and method of farbricating the same

Details Semiconductor device and method of farbricating the same Semiconductor device and method of farbricating the same

1996-01-31

1998-09-22

Saadat, Mahshid D.

Active solid-state devices (e.g., transistors, solid-state diode

With means to control surface effects

Insulating coating

257640, 257637, H01L 2358

Patent

active

058118721

ABSTRACT:
A semiconductor device includes an interlevel film constituted by a first dielectrics film containing dangling bonds and a bonded group of Si and hydrogen, and a second dielectrics film formed on the first dielectrics film.

REFERENCES:
patent: 5455453 (1995-10-01), Harada et al.
patent: 5508540 (1996-04-01), Takeda et al.
patent: 5561319 (1996-10-01), Owens et al.

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