Semiconductor device and method for the fabrication thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With contact or lead

Reexamination Certificate

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C257S787000, C257S666000

Reexamination Certificate

active

06498393

ABSTRACT:

BACKGROUND OF THE INVENTION
The present invention relates generally to a semiconductor device and to a method for the fabrication of such a semiconductor device. The present invention relates more particularly to an extremely thin semiconductor device of high packaging density type which is capable of coping with multipin (high pin count)-ization and to a method for the fabrication of such a low profile semiconductor device.
The recent trend that electronic equipment is toward becoming smaller and smaller in size requires the high packaging density of semiconductor components such as semiconductor devices of resin-encapsulated type, and semiconductor components are now becoming smaller in size and lower in profile. Further, multipin-ization is now advancing even for small size and thin (low profile) semiconductor devices. There have been placed demands for high-density, downsized, and thin semiconductor devices of the resin-encapsulated type.
Referring now to
FIG. 15
, a lead frame for a conventional semiconductor device will be described below.
FIG. 15
is a plan view showing a conventional lead frame structure. As shown, the conventional lead frame is made up of a frame portion
101
, a rectangular die pad portion
102
within the frame portion
101
on which a semiconductor element will be mounted, a suspension lead portion
103
for supporting the die pad portion
102
, a beam-like inner lead portion
14
which is electrically connected, when the semiconductor element is mounted on the die pad portion
102
, to the mounted semiconductor element by a connection portion such as a metal fine wire, an outer lead portion
105
, formed continuously with the inner lead portion
104
, for establishing connection with an external terminal, and a tie bar portion
106
which interconnects and fixes together the outer lead portions
105
and which acts as a resin stopper during resin encapsulation.
Although in the lead frame of
FIG. 15
only one pattern of the design of
FIG. 15
is illustrated, practically a plurality of such patterns are arrayed laterally and vertically in succession.
Referring next to
FIG. 16
, a conventional semiconductor device will be described.
FIG. 16
schematically depicts, in cross section, a semiconductor device of the resin encapsulation type making utilization of the lead frame of FIG.
15
.
As shown in
FIG. 16
, a semiconductor element
107
is mounted on the die pad portion
102
of the lead frame. The semiconductor element
107
and the inner lead portion
104
are electrically connected together by a metal fine wire
108
. The outer peripheries of the semiconductor element
107
on the die pad portion
102
and the inner lead portion
104
are encapsulated by an encapsulating resin
109
. The outer lead portion
105
is so provided as to project outside a lateral surface of the encapsulating resin
109
with its end portion bent.
In a conventional semiconductor device fabrication method, the semiconductor element
107
is first bonded onto the die pad portion
102
of the lead frame by an adhesive (the die bond step), as shown in FIG.
17
. Following the die bond step, the semiconductor element
107
and the tip of the inner lead portion
104
are connected together by the metal fine wire
108
(the wire bonding step). Thereafter, the outer peripheral of the semiconductor element
107
is subjected to encapsulation. In such encapsulation, the region encapsulated by the encapsulating resin
109
is surrounded by the tie bar portion
106
of the lead frame, while the outer lead portion
105
projects outside (the resin encapsulating step). Lastly, the boundary portion of the encapsulating resin
109
is subjected to cutting at the tie bar portion
106
, the outer lead portions
105
are separated from each other, the frame portion
101
is removed, and the tip of the outer lead portion
105
is subjected to bending (the tie bar cut/bend step). In the way described above, the resin-encapsulated type semiconductor device of
FIG. 16
can be fabricated. A broken line of
FIG. 17
indicates the region to be encapsulated by the encapsulating resin
109
.
The conventional lead frame configuration, however, suffers some problems when semiconductor elements are highly integralized and multipin-ized. There is the limit of reducing, when forming an inner lead portion (an outer lead portion), its width. Therefore, if the number of inner lead portions (outer lead portions) is increased with a view to coping with multipin-ization, this usually results in increasing the size of the lead frame itself. As a result, the dimensions of the semiconductor device also increase and it is hard to meet the demand for downsized, thin semiconductor devices. On the other hand, if the number of inner lead portions is increased to cope with semiconductor element multipin-ization without making an alteration in lead frame size, this requires that the width of each inner lead portion be reduced. This will produce many problems with processes such as etching used for lead frame formation.
Recently, as a surface-mount type semiconductor device, certain types of semiconductor devices have been developed (for example, Ball Grid Array (BGA)-type semiconductor devices and Land Grid Array (LGA)-type semiconductor devices). In such a type of semiconductor device, a semiconductor element is mounted on a carrier (a wiring board) having on its bottom surface an external electrode, electrical connections are established, and thereafter the top surface of the carrier is subjected to encapsulation. Such a type of semiconductor device is a semiconductor device onto which bottom surface a mother board is mounted. In future, semiconductor devices of the surface-mount type are expected to become a main stream of semiconductor devices. Accordingly, the problem that conventional lead frames and semiconductor devices making use of such conventional lead frames are unable to keep up with the trend toward the surface-mount type, is becoming serious.
In recent years, technologies for small size/thin packages have been proposed which use no die pad for element mounting. In such technologies, a semiconductor chip is reduced in thickness, electrodes are disposed around the chip, and the outer periphery is single-side encapsulated by encapsulating resin. However, such a single-side encapsulated package has the problem that electrodes are not efficiently exposed from the bottom surface of the encapsulating resin. Moreover, since the thickness is reduced, this produces another problem that stress, caused by encapsulating resin present between electrodes, is applied to these electrodes.
SUMMARY OF THE INVENTION
It is therefore an object of the present invention to provide an extremely thin semiconductor device capable of coping with multipin-ization.
The present invention provides a semiconductor device comprising:
a semiconductor element having a plurality of electrodes;
a plurality of external electrodes disposed around the periphery of the semiconductor element;
a fine wire electrically connected between at least one of surfaces of the plural external electrodes and at least one of the plural electrodes of the semiconductor element; and
an encapsulating resin which encapsulates the semiconductor element, the plural external electrodes, and the fine wires and whose external shape is a rectangular parallelepiped;
wherein a bottom surface of the semiconductor element and a bottom surface of each of the plural external electrodes are exposed from a bottom surface of the encapsulating resin; and
wherein a top surface of the semiconductor element and a top surface of each of the plural external electrodes are located substantially coplanar with each other.
It is preferable that depressed portions are formed in bottom surface areas of the semiconductor device defined between external electrodes of the plural external electrodes and between the semiconductor element and an external electrode of the plural external electrode, wherein the depressed portions are recessed inside the encapsulating resin.
It is preferab

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