Patent
1981-02-13
1984-01-17
Larkins, William D.
357 52, 357 72, 357 84, H01L 2704, G11C 1140
Patent
active
044266570
ABSTRACT:
A semiconductor device having a protective polyimide film layer for preventing .alpha.-rays from intruding into the device is provided. The polyimide film layer has incorporated therein a salient amount of finely divided filler particles, and is formed on the surface of at least a region wherein the semiconductor element is formed. The polyimide film layer is formed by coating the semiconductor substrate with a liquid polyimide or polyamic acid composition having incorporated therein the finely divided filler particles, according to a screen printing method.
REFERENCES:
patent: 3615913 (1971-10-01), Shaw
patent: 4331970 (1982-05-01), Yerman
patent: 4337182 (1982-06-01), Needham
Brody et al., IBM Tech. Discl. Bulletin, vol. 22, No. 4, Sep. 1979, pp. 1460-1461.
Escott et al., IBM Tech. Discl. Bulletin, vol. 22, No. 11, Apr. 1980, p. 4850.
Abiru Akira
Inomata Juro
Sugimoto Masahiro
Fujitsu Limited
Larkins William D.
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