Semiconductor device and method for manufacturing the same

Details Semiconductor device and method for manufacturing the same Semiconductor device and method for manufacturing the same

2005-10-25

2008-07-29

Lindsay, Jr., Walter L. (Department: 2812)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S244000, C257SE21208

Reexamination Certificate

active

07405133

ABSTRACT:
A semiconductor device comprising a semiconductor substrate, and a plurality of capacitors formed on the semiconductor substrate. The capacitors comprise a plurality of lower electrodes formed on the semiconductor substrate, a ferroelectric film formed continuously covering the plurality of lower electrodes, and an upper electrode formed on the surface of the ferroelectric film, wherein each of the capacitors is formed for each of the plurality of lower electrode.

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