Semiconductor device and method for manufacturing the same

Details Semiconductor device and method for manufacturing the same Semiconductor device and method for manufacturing the same

2006-05-16

2006-05-16

Smith, Zandra V. (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C257S750000, C257S758000, C438S401000, C438S612000

Reexamination Certificate

active

07045908

ABSTRACT:
A semiconductor device which is manufactured through a process of forming a second structure on a first structure, by using a photolithography technique, the semiconductor device includes a mark which is provided at a part of the first structure to be covered by the second structure and which is necessary for forming the second structure.

REFERENCES:
patent: 6703328 (2004-03-01), Tanaka et al.
patent: 6740577 (2004-05-01), Jin et al.
patent: 2000-260733 (2000-09-01), None

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