Optical waveguides – Integrated optical circuit
Reexamination Certificate
2006-09-26
2006-09-26
Healy, Brian M. (Department: 2883)
Optical waveguides
Integrated optical circuit
C385S129000, C385S130000, C385S131000, C385S088000, C385S092000, C438S025000, C438S026000, C438S027000, C438S028000, C438S029000, C438S031000
Reexamination Certificate
active
07113661
ABSTRACT:
The present invention provides a semiconductor device using a support of new form which can further expand the range of design and enlarge a circuit size while restraining volume of a substrate than a flexible flat-plate substrate. A method for manufacturing a semiconductor device comprising the steps of: forming an insulating film on a fibrous support; forming a semiconductor film so as to be in contact with the insulating film; and forming a semiconductor device using the semiconductor film; wherein the step of forming the insulating film or the step of forming the semiconductor film is performed with the support rotating, using a rotational axis parallel to a longitudinal direction of the support as a center.
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Akiba Mai
Arai Yasuyuki
Healy Brian M.
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
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