Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
Patent
1997-04-10
2000-04-11
Martin-Wallace, Valencia
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Field effect device in non-single crystal, or...
257383, 257384, 257324, 257408, 257410, 257412, 257401, 257 57, 257 66, H01L 2976
Patent
active
060490926
ABSTRACT:
A TFT formed on an insulating substrate source, drain and channel regions, a gate insulating film formed on at least the channel region and a gate electrode formed on the gate insulating film. Between the channel region and the drain region, a region having a higher resistivity is provided in order to reduce an loff current. A method for forming this structure comprises the steps of anodizing the gate electrode to form a porous anodic oxide film on the side of the gate electrode; removing a portion of the gate insulating using the porous anodic oxide film as a mask so that the gate insulating film extends beyond the gate electrode but does not completely cover the source and drain regions. Thereafter, an ion doping of one conductivity element is performed. The high resistivity region is defined under the gate insulating film.
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Konuma Toshimitsu
Ohnuma Hideto
Sugawara Akira
Suzawa Hideomi
Suzuki Atsunori
Martin-Wallace Valencia
Robinson Eric J.
Semiconductor Energy Laboratory Co,. Ltd.
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