Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Reexamination Certificate
1997-04-30
2009-08-04
Menz, Laura M (Department: 2813)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
C438S163000
Reexamination Certificate
active
07569408
ABSTRACT:
An insulated gate field effect semiconductor device comprising a substrate having provided thereon a thin-film structured insulated gate field effect semiconductor device, said device being characterized by that it comprises a metal gate electrode and at least the side thereof is coated with an oxide of the metal. The insulated gate field effect semiconductor device according to the present invention is also characterized by that the contact holes for the extracting contacts of the source and drain regions are provided at about the same position of the end face of the anodically oxidized film established at the side of the gate. Furthermore, the present invention provides a method for forming insulated gate field effect semiconductor devices using less masks.
REFERENCES:
patent: 3275915 (1966-09-01), Harendza
patent: 3634203 (1972-01-01), McMahon et al.
patent: 3671819 (1972-06-01), Swanson
patent: 3740280 (1973-06-01), Ronen
patent: 3775262 (1973-11-01), Heyerdahl
patent: 3890636 (1975-06-01), Harada et al.
patent: 4015281 (1977-03-01), Nagata et al.
patent: 4015781 (1977-04-01), Beck
patent: 4042945 (1977-08-01), Lin et al.
patent: 4055885 (1977-11-01), Takemoto
patent: 4075653 (1978-02-01), Howard
patent: 4167018 (1979-09-01), Ohba et al.
patent: 4455737 (1984-06-01), Godejahn, Jr.
patent: 4468855 (1984-09-01), Sasaki
patent: 4469568 (1984-09-01), Kato et al.
patent: 4470852 (1984-09-01), Ellsworth
patent: 4485393 (1984-11-01), Kumamaru et al.
patent: 4528480 (1985-07-01), Unagami et al.
patent: 4557036 (1985-12-01), Kyuragi et al.
patent: 4601097 (1986-07-01), Shimbo
patent: 4616399 (1986-10-01), Ooka
patent: 4625224 (1986-11-01), Nakagawa et al.
patent: 4646426 (1987-03-01), Sasaki
patent: 4656101 (1987-04-01), Yamazaki
patent: 4692994 (1987-09-01), Moniwa et al.
patent: 4727044 (1988-02-01), Yamazaki
patent: 4731642 (1988-03-01), Katto et al.
patent: 4746628 (1988-05-01), Takafuji et al.
patent: 4761058 (1988-08-01), Okubo et al.
patent: 4769338 (1988-09-01), Ovshinsky et al.
patent: 4770498 (1988-09-01), Aoki et al.
patent: 4782037 (1988-11-01), Tomozawa et al.
patent: 4822751 (1989-04-01), Ishizu et al.
patent: 4851363 (1989-07-01), Troxell et al.
patent: 4866498 (1989-09-01), Myers
patent: 4868137 (1989-09-01), Kubota
patent: 4900695 (1990-02-01), Takahashi et al.
patent: 4905066 (1990-02-01), Kohjo et al.
patent: 4906587 (1990-03-01), Blake
patent: 5040037 (1991-08-01), Yamaguchi et al.
patent: 5041888 (1991-08-01), Possin et al.
patent: 5051794 (1991-09-01), Mori
patent: 5068699 (1991-11-01), Chang
patent: 5079605 (1992-01-01), Blake
patent: 5097311 (1992-03-01), Iwase et al.
patent: 5112764 (1992-05-01), Mitra et al.
patent: 5124823 (1992-06-01), Kawasaki et al.
patent: 5126283 (1992-06-01), Pintchovski et al.
patent: 5130772 (1992-07-01), Choi
patent: 5132821 (1992-07-01), Nicholas
patent: 5134093 (1992-07-01), Onishi et al.
patent: 5142344 (1992-08-01), Yamazaki
patent: 5146301 (1992-09-01), Yamamura et al.
patent: 5165075 (1992-11-01), Hiroki et al.
patent: 5166816 (1992-11-01), Kaneko et al.
patent: 5177548 (1993-01-01), Nakamura et al.
patent: 5177568 (1993-01-01), Honma et al.
patent: 5177577 (1993-01-01), Taniguchi et al.
patent: 5196912 (1993-03-01), Matsumoto et al.
patent: 5225356 (1993-07-01), Omura et al.
patent: 5237188 (1993-08-01), Iwai et al.
patent: 5240868 (1993-08-01), Bae et al.
patent: 5250931 (1993-10-01), Misawa et al.
patent: 5258319 (1993-11-01), Inuishi et al.
patent: 5270567 (1993-12-01), Mori et al.
patent: 5272361 (1993-12-01), Yamazaki
patent: 5289030 (1994-02-01), Yamazaki et al.
patent: 5306651 (1994-04-01), Masumo et al.
patent: 5308998 (1994-05-01), Yamazaki et al.
patent: 5313075 (1994-05-01), Zhang et al.
patent: 5328861 (1994-07-01), Miyakawa
patent: 5359206 (1994-10-01), Yamamoto et al.
patent: 5412493 (1995-05-01), Kunii et al.
patent: 5422293 (1995-06-01), Konya
patent: 5424230 (1995-06-01), Wakai
patent: 5468987 (1995-11-01), Yamazaki et al.
patent: 5474942 (1995-12-01), Kodaira et al.
patent: 5474945 (1995-12-01), Yamazaki et al.
patent: 5482870 (1996-01-01), Inoue
patent: 5495121 (1996-02-01), Yamazaki et al.
patent: 5550078 (1996-08-01), Sung
patent: 5561075 (1996-10-01), Nakazawa
patent: 5572047 (1996-11-01), Hiroki et al.
patent: 5576225 (1996-11-01), Zhang et al.
patent: 5583366 (1996-12-01), Nakazawa
patent: 5592008 (1997-01-01), Yamazaki et al.
patent: 5596214 (1997-01-01), Endo
patent: 5814539 (1998-09-01), Nakazawa
patent: 5859445 (1999-01-01), Yamazaki
patent: 5879969 (1999-03-01), Yamazaki et al.
patent: 5917225 (1999-06-01), Yamazaki et al.
patent: 5930627 (1999-07-01), Zhou et al.
patent: 5998249 (1999-12-01), Liaw et al.
patent: 6077738 (2000-06-01), Lee et al.
patent: 6136625 (2000-10-01), Nakazawa
patent: 2002/0017687 (2002-02-01), Yamazaki et al.
patent: 0225426 (1987-06-01), None
patent: 0301463 (1989-02-01), None
patent: 0 072 216 (1989-04-01), None
patent: 0329482 (1989-08-01), None
patent: 46-003025 (1971-10-01), None
patent: 46-3025 (1971-10-01), None
patent: 47-18278 (1972-09-01), None
patent: 47-018278 (1972-09-01), None
patent: 47-25192 (1972-10-01), None
patent: 48-022285 (1973-03-01), None
patent: 48-22285 (1973-03-01), None
patent: 49-078483 (1974-07-01), None
patent: 53-38278 (1978-08-01), None
patent: 55-018056 (1980-02-01), None
patent: 55-024420 (1980-02-01), None
patent: 56-81972 (1981-07-01), None
patent: 57-087175 (1982-05-01), None
patent: 58-023479 (1983-02-01), None
patent: 58-032446 (1983-02-01), None
patent: 58-32466 (1983-02-01), None
patent: 58-081972 (1983-05-01), None
patent: 58-091676 (1983-05-01), None
patent: 58-093273 (1983-06-01), None
patent: 58-095814 (1983-06-01), None
patent: 58-100461 (1983-06-01), None
patent: 58-106861 (1983-06-01), None
patent: 58-115864 (1983-07-01), None
patent: 58-124273 (1983-07-01), None
patent: 58-158967 (1983-09-01), None
patent: 58-158976 (1983-09-01), None
patent: 58-164268 (1983-09-01), None
patent: 58-168278 (1983-10-01), None
patent: 58-186967 (1983-11-01), None
patent: 59-021067 (1984-02-01), None
patent: 59-108360 (1984-06-01), None
patent: 59-121876 (1984-07-01), None
patent: 59-126673 (1984-07-01), None
patent: 59-214262 (1984-12-01), None
patent: 60-245173 (1985-12-01), None
patent: 61-105873 (1986-05-01), None
patent: 61-147574 (1986-07-01), None
patent: 61-156885 (1986-07-01), None
patent: 61-176155 (1986-08-01), None
patent: 61-185724 (1986-08-01), None
patent: 61-248418 (1986-11-01), None
patent: 61-252667 (1986-11-01), None
patent: 62-005662 (1987-01-01), None
patent: 62-008573 (1987-01-01), None
patent: 62-073658 (1987-04-01), None
patent: 62-073660 (1987-04-01), None
patent: 62-104172 (1987-05-01), None
patent: 62-105474 (1987-05-01), None
patent: 62-124769 (1987-06-01), None
patent: 62-131575 (1987-06-01), None
patent: 62-214669 (1987-09-01), None
patent: 63-009978 (1988-01-01), None
patent: 63-070832 (1988-03-01), None
patent: 63-76474 (1988-04-01), None
patent: 63-178560 (1988-07-01), None
patent: 63-261875 (1988-10-01), None
patent: 64-12576 (1989-01-01), None
patent: 64-023575 (1989-01-01), None
patent: 64-30272 (1989-02-01), None
patent: 64-035961 (1989-02-01), None
patent: 64-047076 (1989-02-01), None
patent: 01-089464 (1989-04-01), None
patent: 64-089464 (1989-04-01), None
patent: 01-123234 (1989-05-01), None
patent: 01-129234 (1989-05-01), None
patent: 01-183845 (1989-07-01), None
patent: 1-183853 (1989-07-01), None
patent: 1-185522 (1989-07-01), None
patent: 1-222468 (1989-09-01), None
patent: 01-255831 (1989-10-01), None
patent: 01-274117 (1989-11-01), None
patent: 01-276671 (1989-11-01), None
patent: 01-276672 (1989-11-01), None
patent: 2-85826 (1990-03-01), None
patent: 2-90683 (1990-03-01), None
patent: 2-102573 (1990-04-01), None
patent: 2-148831 (1990-06-01), None
patent: 2-159730 (1990-06-01), None
patent: 02-166281 (1990-06-01), None
patent: 2-210420 (1990-08-01), None
patent: 2-216129 (1990-08-01), None
patent: 2-228042 (1990-09-01), None
patent: 2-238666 (1990-09-01), None
patent: 2-260540 (1990-10-01), None
patent: 02-148132 (1990-12-01), None
patent: 2-148132 (1990-12-01), None
patent: 2-306664 (1990-12-0
Hamatani Toshiji
Mase Akira
Yamazaki Shunpei
Menz Laura M
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
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