Semiconductor device and method for fabrication thereof

Details Semiconductor device and method for fabrication thereof Semiconductor device and method for fabrication thereof

1995-01-19

1997-07-01

Niebling, John

Fishing, trapping, and vermin destroying

437203, H01L 2144

Patent

active

056438320

ABSTRACT:
There are disclosed a semiconductor device and a fabrication process thereof. The semiconductor device comprises a trench contact hole which goes through a source electrode of MOSFET to a semiconductor substrate, and a conductive wire filled in the trench contact hole. A substrate electrode is formed underneath the trench contact hole and thus, electrically connected with the source electrode by the conductive wire. Accordingly, the semiconductor device is very reduced in the connection part between the source electrode and the substrate electrode and can be applied for accomplishment of high integration of semiconductor device.

REFERENCES:
patent: 5077228 (1991-12-01), Eklund et al.
patent: 5455190 (1995-10-01), Hsu

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