Semiconductor device and manufacturing method thereof

Details Semiconductor device and manufacturing method thereof Semiconductor device and manufacturing method thereof

2008-08-14

2010-06-01

Hoang, Quoc D (Department: 2892)

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Field effect device in non-single crystal, or...

C257S408000, C257SE27100, C257SE29151

Reexamination Certificate

active

07728334

ABSTRACT:
A TFT is manufactured using at least five photomasks in a conventional liquid crystal display device, and therefore the manufacturing cost is high.By performing the formation of the pixel electrode127, the source region123and the drain region124by using three photomasks in three photolithography steps, a liquid crystal display device prepared with a pixel TFT portion, having a reverse stagger type n-channel TFT, and a storage capacitor can be realized.

REFERENCES:
patent: 3967981 (1976-07-01), Yamazaki
patent: 4624737 (1986-11-01), Shimbo
patent: 4730903 (1988-03-01), Yamazaki et al.
patent: 4914503 (1990-04-01), Shirato et al.
patent: 4960719 (1990-10-01), Tanaka et al.
patent: 5028551 (1991-07-01), Dohjo et al.
patent: 5084961 (1992-02-01), Yoshikawa
patent: 5151806 (1992-09-01), Kawamoto et al.
patent: 5231039 (1993-07-01), Sakono et al.
patent: 5261156 (1993-11-01), Mase et al.
patent: 5346833 (1994-09-01), Wu
patent: 5362660 (1994-11-01), Kwasnick et al.
patent: 5428250 (1995-06-01), Ikeda et al.
patent: 5466617 (1995-11-01), Shannon
patent: 5478766 (1995-12-01), Park et al.
patent: 5491352 (1996-02-01), Tsuji
patent: 5532180 (1996-07-01), den Boer et al.
patent: 5539219 (1996-07-01), den Boer et al.
patent: 5561074 (1996-10-01), Koide et al.
patent: 5561440 (1996-10-01), Kitajima et al.
patent: 5583675 (1996-12-01), Yamada et al.
patent: 5622814 (1997-04-01), Miyata et al.
patent: 5644147 (1997-07-01), Yamazaki et al.
patent: 5648662 (1997-07-01), Zhang et al.
patent: 5668379 (1997-09-01), Ono et al.
patent: 5668651 (1997-09-01), Yamada et al.
patent: 5684318 (1997-11-01), Ayres et al.
patent: 5706064 (1998-01-01), Fukunaga et al.
patent: 5729312 (1998-03-01), Yamagishi et al.
patent: 5734177 (1998-03-01), Sakamoto
patent: 5739549 (1998-04-01), Takemura et al.
patent: 5739880 (1998-04-01), Suzuki et al.
patent: 5739882 (1998-04-01), Shimizu et al.
patent: 5739887 (1998-04-01), Ueda et al.
patent: 5744820 (1998-04-01), Matsushima et al.
patent: 5757453 (1998-05-01), Shin et al.
patent: 5757456 (1998-05-01), Yamazaki et al.
patent: 5760854 (1998-06-01), Ono et al.
patent: 5766977 (1998-06-01), Yamazaki
patent: 5780872 (1998-07-01), Misawa et al.
patent: 5793072 (1998-08-01), Kuo
patent: 5798812 (1998-08-01), Nishiki et al.
patent: 5804501 (1998-09-01), Kim
patent: 5811318 (1998-09-01), Kweon
patent: 5811328 (1998-09-01), Zhang et al.
patent: 5811835 (1998-09-01), Seiki et al.
patent: 5811846 (1998-09-01), Miura et al.
patent: 5818070 (1998-10-01), Yamazaki et al.
patent: 5821138 (1998-10-01), Yamazaki et al.
patent: 5821622 (1998-10-01), Tsuji et al.
patent: 5825449 (1998-10-01), Shin
patent: 5828433 (1998-10-01), Shin
patent: 5830785 (1998-11-01), Sanson et al.
patent: 5834327 (1998-11-01), Yamazaki et al.
patent: 5838400 (1998-11-01), Ueda et al.
patent: 5844643 (1998-12-01), Onishi et al.
patent: 5847687 (1998-12-01), Hirakata et al.
patent: 5849601 (1998-12-01), Yamazaki
patent: 5852487 (1998-12-01), Fujimori et al.
patent: 5867233 (1999-02-01), Tanaka
patent: 5872611 (1999-02-01), Hirata et al.
patent: 5874326 (1999-02-01), Lyu
patent: 5880794 (1999-03-01), Hwang
patent: 5888855 (1999-03-01), Nagahisa et al.
patent: 5889291 (1999-03-01), Koyama et al.
patent: 5892562 (1999-04-01), Yamazaki et al.
patent: 5899547 (1999-05-01), Yamazaki et al.
patent: 5903326 (1999-05-01), Lee
patent: 5907380 (1999-05-01), Lien
patent: 5917564 (1999-06-01), Kim et al.
patent: 5917567 (1999-06-01), Oh et al.
patent: 5940154 (1999-08-01), Ukita et al.
patent: 5942767 (1999-08-01), Na et al.
patent: 5943559 (1999-08-01), Maeda
patent: 5953093 (1999-09-01), Hirata et al.
patent: 5959599 (1999-09-01), Hirakata
patent: 5966189 (1999-10-01), Matsuo
patent: 5968850 (1999-10-01), Jeong et al.
patent: 5977562 (1999-11-01), Hirakata et al.
patent: 5986724 (1999-11-01), Akiyama et al.
patent: 5990998 (1999-11-01), Park et al.
patent: 5994721 (1999-11-01), Zhong et al.
patent: 5995190 (1999-11-01), Nagae et al.
patent: 5998229 (1999-12-01), Lyu et al.
patent: 5998230 (1999-12-01), Gee-Sung et al.
patent: 6008065 (1999-12-01), Lee et al.
patent: 6008869 (1999-12-01), Oana et al.
patent: 6020598 (2000-02-01), Yamazaki
patent: 6025216 (2000-02-01), Ha
patent: 6025891 (2000-02-01), Kim
patent: 6025892 (2000-02-01), Kawai et al.
patent: 6037017 (2000-03-01), Kashiro
patent: 6038003 (2000-03-01), Kim
patent: 6055028 (2000-04-01), Nishi et al.
patent: 6061112 (2000-05-01), Ukita et al.
patent: 6064358 (2000-05-01), Kitajima et al.
patent: 6064456 (2000-05-01), Taniguchi et al.
patent: 6067141 (2000-05-01), Yamada et al.
patent: 6072556 (2000-06-01), Hirakata et al.
patent: 6072557 (2000-06-01), Kishimoto
patent: 6075257 (2000-06-01), Song
patent: 6097458 (2000-08-01), Tsuda et al.
patent: 6097459 (2000-08-01), Shimada et al.
patent: 6097465 (2000-08-01), Hiroki et al.
patent: 6114184 (2000-09-01), Matsumoto et al.
patent: 6118502 (2000-09-01), Yamazaki et al.
patent: 6124155 (2000-09-01), Zhang et al.
patent: 6124604 (2000-09-01), Koyama et al.
patent: 6124606 (2000-09-01), den Boer et al.
patent: 6130443 (2000-10-01), Hong et al.
patent: 6130729 (2000-10-01), Oh et al.
patent: 6133977 (2000-10-01), Lee et al.
patent: 6140158 (2000-10-01), Rhee et al.
patent: 6141077 (2000-10-01), Hirata et al.
patent: 6153893 (2000-11-01), Inoue et al.
patent: 6160600 (2000-12-01), Yamazaki et al.
patent: 6166396 (2000-12-01), Yamazaki
patent: 6166399 (2000-12-01), Zhang et al.
patent: 6172728 (2001-01-01), Hiraishi
patent: 6177968 (2001-01-01), Okada et al.
patent: 6184946 (2001-02-01), Ando et al.
patent: 6188452 (2001-02-01), Kim et al.
patent: 6190933 (2001-02-01), Shimabukuro et al.
patent: 6197625 (2001-03-01), Choi
patent: 6198133 (2001-03-01), Yamazaki et al.
patent: 6208390 (2001-03-01), Ejiri et al.
patent: 6208395 (2001-03-01), Kanoh et al.
patent: 6215541 (2001-04-01), Song et al.
patent: 6218221 (2001-04-01), Sah
patent: 6222603 (2001-04-01), Sakai et al.
patent: 6235561 (2001-05-01), Seiki et al.
patent: 6239854 (2001-05-01), Hirakata et al.
patent: 6243064 (2001-06-01), Hirakata
patent: 6255668 (2001-07-01), Kang et al.
patent: 6265889 (2001-07-01), Tomita et al.
patent: 6266117 (2001-07-01), Yanagawa et al.
patent: 6266121 (2001-07-01), Shigeta et al.
patent: 6266122 (2001-07-01), Kishimoto et al.
patent: 6268617 (2001-07-01), Hirakata et al.
patent: 6271903 (2001-08-01), Shin et al.
patent: 6287899 (2001-09-01), Park et al.
patent: 6297519 (2001-10-01), Fujikawa et al.
patent: 6304243 (2001-10-01), Kondo et al.
patent: 6317187 (2001-11-01), Nakajima et al.
patent: 6323051 (2001-11-01), Shimada
patent: 6330049 (2001-12-01), Kume et al.
patent: 6331845 (2001-12-01), Kitajima et al.
patent: 6331881 (2001-12-01), Hatano et al.
patent: 6335213 (2002-01-01), Zhang et al.
patent: 6339462 (2002-01-01), Kishimoto et al.
patent: 6341002 (2002-01-01), Shimizu et al.
patent: 6342939 (2002-01-01), Hirata et al.
patent: 6359672 (2002-03-01), Gu et al.
patent: 6362866 (2002-03-01), Yamazaki et al.
patent: 6365933 (2002-04-01), Yamazaki et al.
patent: 6368485 (2002-04-01), Ue et al.
patent: 6384818 (2002-05-01), Yamazaki et al.
patent: 6387737 (2002-05-01), Yamazaki et al.
patent: 6411358 (2002-06-01), Song et al.
patent: 6429057 (2002-08-01), Hong et al.
patent: 6433842 (2002-08-01), Kaneko et al.
patent: 6437844 (2002-08-01), Hattori et al.
patent: 6441399 (2002-08-01), Koyama et al.
patent: 6456269 (2002-09-01), Hirakata
patent: 6462802 (2002-10-01), Nishimura et al.
patent: 6465268 (2002-10-01), Hirakata et al.
patent: 6466289 (2002-10-01), Lee et al.
patent: 6493050 (2002-12-01), Lien et al.
patent: 6498634 (2002-12-01), Yamazaki et al.
patent: 6519018 (2003-02-01), Samant et al.
patent: 6528357 (2003-03-01), Dojo et al.
patent: 6529256 (2003-03-01), Seo
patent: 6531392 (2003-03-01), Song et al.
patent: 6583065 (2003-06-01), Williams et al.
patent: 6587162 (2003-07-01), Kaneko et al.
patent: 6599791 (2003-07-01), Koyama et al.
patent: 6611309 (2003-08-01), Park et al.
patent: 6617644 (2003-09-01), Yamazaki et al.
patent: 6621102 (2003-09-01), Hirakata et al.
patent: 6624864 (2003-09-01), Kubo et al.
patent: 6630977

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