Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Patent
1996-10-03
1997-08-12
Thomas, Tom
Active solid-state devices (e.g., transistors, solid-state diode
With means to control surface effects
Insulating coating
257774, 257296, 257305, H01L 2968
Patent
active
056568533
ABSTRACT:
A field oxide film is provided in the surface of a semiconductor substrate. An interlayer insulating film is provided on the semiconductor substrate so as to cover an active layer. A contact hole exposing the surface of the active layer is provided in the interlayer insulating film. A conductor fills the contact hole so as to be electrically connected to the surface of the active layer. The end portion of the field oxide film has a surface perpendicular with respect to the surface of the semiconductor substrate. As a result, a dynamic random access memory can be obtained which is improved so that leakage current is reduced, which in turn increases a hold time of information.
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Hardy David B.
Mitsubishi Denki & Kabushiki Kaisha
Thomas Tom
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