Semiconductor device and manufacturing method thereof

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Making plural separate devices

Reexamination Certificate

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Reexamination Certificate

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11492044

ABSTRACT:
A stacked MCM is manufactured at reduced cost without using expensive apparatus. A first wiring and a second wiring are formed on a surface of a semiconductor chip of a first semiconductor device through an insulation film. A glass substrate having an opening to expose the second wiring is bonded to the surface of the semiconductor chip on which the first wiring and the second wiring are formed. A third wiring is disposed on a back surface and a side surface of the semiconductor chip through an insulation film and connected to the first wiring. And a conductive terminal of another semiconductor device is connected to the second wiring through the opening.

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patent: 6054760 (2000-04-01), Martinez-Tovar et al.
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patent: 6894386 (2005-05-01), Poo et al.
patent: 2002/0025587 (2002-02-01), Wada
patent: 2002/0047210 (2002-04-01), Yamada et al.
patent: 2002/0139577 (2002-10-01), Miller
patent: 09-232503 (1997-09-01), None

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