Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
Reexamination Certificate
2011-06-28
2011-06-28
Cao, Phat X (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Field effect device in non-single crystal, or...
C257S069000, C257S072000, C257SE51005
Reexamination Certificate
active
07968884
ABSTRACT:
A semiconductor device manufactured utilizing an SOI substrate, in which defects due to an end portion of an island-shaped silicon layer are prevented and the reliability is improved, and a manufacturing method thereof. The following are included: an SOI substrate in which an insulating layer and an island-shaped silicon layer are stacked in order over a support substrate; a gate insulating layer provided over one surface and a side surface of the island-shaped silicon layer; and a gate electrode which is provided over the island-shaped silicon layer with the gate insulating layer interposed therebetween. The gate insulating layer is formed such that the dielectric constant in the region which is in contact with the side surface of the island-shaped silicon layer is lower than that over the one surface of the island-shaped silicon layer.
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Office Action re Chinese application No. CN 200710196482.2, dated Mar. 9, 2011 (with English translation).
Ikeda Kazuko
Sasagawa Shinya
Suzawa Hideomi
Yamazaki Shunpei
Cao Phat X
Husch & Blackwell LLP
Semiconductor Energy Laboratory Co,. Ltd.
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