Semiconductor device and display device having alignment mark

Details Semiconductor device and display device having alignment mark Semiconductor device and display device having alignment mark

2007-10-05

2010-11-02

Pham, Long (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C257S752000, C257S758000

Reexamination Certificate

active

07825529

ABSTRACT:
A semiconductor device includes a semiconductor substrate and an alignment mark. The alignment mark is provided on the semiconductor substrate and optically detectable. The alignment mark includes a bright area and a dark area. The bright area outputs light reflected from a surface of the semiconductor substrate. The dark area includes metal wirings, outputs light reflected from surfaces of the metal wirings, and has brightness lower than that of the bright area.

REFERENCES:
patent: 5858854 (1999-01-01), Tsai et al.
patent: 6285455 (2001-09-01), Shiraishi
patent: 6514851 (2003-02-01), Saito
patent: 2003/0057452 (2003-03-01), Saito
patent: 7-221166 (1995-08-01), None
patent: 2000-182914 (2000-06-01), None
patent: 2001-155983 (2001-06-01), None
Korean Office Action dated Feb. 10, 2009 with Partial English-Language Translation of the Japanese-Language Translation.

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