Semiconductor device and a method of manufacturing the same

Details Semiconductor device and a method of manufacturing the same Semiconductor device and a method of manufacturing the same

1994-12-30

1995-11-07

Thomas, Tom

Fishing, trapping, and vermin destroying

437 47, 437 60, H01L 218242

Patent

active

054647878

ABSTRACT:
A semiconductor device and a method of manufacturing the same. In the present invention, the charge storage electrode has a structure in which trenches having a constant width and depth with a constant interval toward the center of the charge storage electrode along the side end of the charge storage electrode are formed, at least one other trench is formed on top of the charge storage electrode surrounding the other trench, and the bottom of the side of the charge storage electrode is shaped as a single step. Accordingly, the present invention can obtain the effect of increasing the efficient surface area of the charge storage electrode by forming at least one trench on the surface of the charge storage electrode, and the resulting increase in capacitance improves the reliability of the device.

REFERENCES:
patent: 5294561 (1994-03-01), Tamigawa
patent: 5314845 (1994-05-01), Iguchi et al.
patent: 5389560 (1995-02-01), Panle
patent: 5389566 (1995-02-01), Lage
patent: 5389568 (1995-02-01), Yum

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