Communications: radio wave antennas – Antennas – Microstrip
Reexamination Certificate
2011-06-28
2011-06-28
Nguyen, Hoang V (Department: 2821)
Communications: radio wave antennas
Antennas
Microstrip
C343S850000
Reexamination Certificate
active
07969363
ABSTRACT:
An object of the present invention is to prevent electrical characteristics of circuit elements from being adversely affected by copper diffusion in a semiconductor device having an integrated circuit and an antenna formed over the same substrate, which uses copper plating for the antenna. Another object is to prevent a defect of a semiconductor device due to poor connection between an antenna and an integrated circuit in a semiconductor device having the integrated circuit and the antenna formed over the same substrate. In a semiconductor device having an integrated circuit100and an antenna101formed over one substrate102, when a copper plating layer108is used for a conductor of the antenna101, it is possible to prevent copper diffusion to circuit elements and decrease an adverse effect on electrical characteristics of circuit elements due to the copper diffusion because a base layer107of the antenna101uses a nitride film of a predetermined metal. Moreover, by the use of nickel nitride as a metal nitride for the base layer of the antenna, poor connection between the antenna and the integrated circuit can be decreased.
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Fujii Teruyuki
Hanaoka Kazuya
Ohnuma Hideto
Fish & Richardson P.C.
Nguyen Hoang V
Semiconductor Energy Laboratory Co,. Ltd.
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