Semiconductor device

Details Semiconductor device Semiconductor device

1992-12-24

1995-02-21

Crane, Sara W.

Active solid-state devices (e.g., transistors, solid-state diode

With means to control surface effects

Insulating coating

257432, 257433, 257791, H01L 2934

Patent

active

053919130

ABSTRACT:
In the present invention, for the purpose of precluding defective image caused by stains adhering on the surfaces of a semiconductor device and a color filter of a solid-state color image sensor, a semiconductor device excellent in the water- and oil- repellency, anti-soiling property and durability is provided, by forming on the each surface a uniform water- and oil-repellent protective film with a thickness on the order of nanometer, by treating with a nonaqueous solvent containing a chlorosilane surface treating agent having a fluoroalkyl.

REFERENCES:
patent: 2913358 (1959-11-01), Harrington et al.
patent: 4388128 (1983-06-01), Ogawa et al.
patent: 4973537 (1990-11-01), Tei et al.
patent: 5225499 (1993-06-01), Kokaku et al.

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