Semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device

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257 38, 257 39, 257222, 257224, 257232, 257233, 257242, 257243, 348249, 348311, H01L 2978, H01L 2714, H01L 3100

Patent

active

053450990

ABSTRACT:
In a CCD device, on a semiconductor substrate, and in the insulation films, plural first semiconductor regions and plural second semiconductor regions are formed buried in the insulation films, intermediating a tunneling insulation film therebetween in a manner to spatially isolate them from each other.

REFERENCES:
patent: 4878102 (1989-10-01), Bakker et al.
"Amorphous-silicon charge-coupled devices", Satoru Kishida et al, Applied Physics Letter, vol. 41 (No. 12), Dec. 15, 1982, pp. 1154-1156.
Carlo H. Sequin, et al: "Charge Transfer Device", published by Academic Press, Inc., in 1975; pp. 1-pp. 55.

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