Computer-aided design and analysis of circuits and semiconductor – Design of semiconductor mask or reticle – Analysis and verification
Reexamination Certificate
2008-11-07
2011-11-22
Chiang, Jack (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Design of semiconductor mask or reticle
Analysis and verification
C716S052000
Reexamination Certificate
active
08065637
ABSTRACT:
A semiconductor device having a physical pattern based on a designed pattern is provided. The designed pattern includes a target pattern and a correction pattern. The target pattern includes a first portion of an edge with a first distance between the first portion and a pattern opposed thereto, a second portion of the edge with a second distance between the second portion and a pattern opposed thereto, which is different from the first distance, and a third portion of the edge having a first region of the edge with the first distance between the first region and the pattern opposed thereto.
REFERENCES:
patent: 5867253 (1999-02-01), Nakae
patent: 6570174 (2003-05-01), Tounai et al.
patent: 6721938 (2004-04-01), Pierrat et al.
patent: 6777138 (2004-08-01), Pierrat et al.
patent: 7058923 (2006-06-01), Tounai et al.
patent: 7080349 (2006-07-01), Babcock et al.
patent: 2004/0205688 (2004-10-01), Pierrat
patent: 8-321450 (1996-12-01), None
patent: 9-319067 (1997-12-01), None
patent: 10-104818 (1998-04-01), None
patent: 2001-92112 (2001-04-01), None
patent: 2002-131882 (2002-05-01), None
Notification of First Office Action from the SIPO of the People's Republic of China, mailed Apr. 28, 2006, in Chinese Patent Application No. 2004-100500846, and English translation thereof.
Notification of Reasons for Rejection from the Japan Patent Office, mailed Oct. 23, 2007, in Japanese Patent Application No. 2003-190341, and English translation thereof.
Chiang Jack
Finnegan Henderson Farabow Garrett & Dunner LLP
Kabushiki Kaisha Toshiba
Tat Binh
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