Semiconductor device

Details Semiconductor device Semiconductor device

2005-06-13

2009-06-02

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S721000, C073S727000

Reexamination Certificate

active

07540198

ABSTRACT:
It is an object of the present invention to provide a small, yet high sensitivity semiconductor device. A semiconductor pressure sensor1includes an SOI substrate2on which a diaphragm3is formed and four piezo resistor elements R1to R4provided on the SOI substrate2. Of the piezo resistor elements R1to R4, two mutually facing piezo resistor elements R1to R4are arranged across the inside and outside of the diaphragm3so as to satisfy a relationship of 0.5<Leff/L<1, where L is the overall length and Leff is the length from the inside to edge of the diaphragm3.

REFERENCES:
patent: 5201681 (1993-04-01), Okunuki et al.
patent: 5361015 (1994-11-01), Okunuki et al.
patent: 5466961 (1995-11-01), Kikuchi et al.
patent: 5598037 (1997-01-01), Kikuchi et al.
patent: 5693959 (1997-12-01), Inoue et al.
patent: 5903043 (1999-05-01), Ichikawa et al.
patent: 5918115 (1999-06-01), Kikuchi et al.
patent: 6049235 (2000-04-01), Ichikawa et al.
patent: 6373099 (2002-04-01), Kikuchi et al.
patent: 2005/0127415 (2005-06-01), Yuzurihara et al.
patent: 2590960 (1996-12-01), None
patent: 2000-214022 (2000-08-01), None
Masayuki Yoneda, “Optimized Design of Piezoresistive Pressure Sensors”, Aug. 10, 2000, http://jp.yamatake.com./corp/rd/tech/review/pdf/2000—8—01/2000—8—01.pdf.
Preliminary Report on Patentability issued in counterpart application PCT/JP 2005/011191.

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