Semiconductor device

Details Semiconductor device Semiconductor device

2007-06-19

2007-06-19

Andujar, Leonardo (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

Reexamination Certificate

active

10736694

ABSTRACT:
A semiconductor device includes a substrate which has a main surface and an alignment mark which is formed on the main surface and which has a pattern, wherein the pattern in a plane view has a shape that is obtained by eliminating corners from a polygon.

REFERENCES:
patent: 6399256 (2002-06-01), Ueno
patent: 2000133572 (2000-05-01), None
patent: 2000150358 (2000-05-01), None
patent: 2000-171966 (2000-06-01), None
patent: 2002064055 (2002-02-01), None

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