Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate
2006-03-28
2006-03-28
Vu, Hung (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Including dielectric isolation means
C257S347000, C257S510000
Reexamination Certificate
active
07019380
ABSTRACT:
A semiconductor device includes a semiconductor substrate having an element region, and an element isolation region formed around the element region, the element isolation region being formed of an insulation material having a higher thermal expansion coefficient than the element region.
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Kabushiki Kaisha Toshiba
Vu Hung
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