Semiconductor device

Details Semiconductor device Semiconductor device

2005-06-21

2005-06-21

Thompson, Craig A. (Department: 2813)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

C257S779000, C257S781000, C257S765000, C438S612000, C438S613000

Reexamination Certificate

active

06909191

ABSTRACT:
There is provided a semiconductor device comprising a Cu film provided above a main surface of a semiconductor substrate and used as a wiring, an intermediate layer formed at least on the Cu film, and an Al film formed on the intermediate layer and used as a pad, wherein the intermediate layer comprises a refractory metal nitride film and a refractory metal film formed on the refractory metal nitride film.

REFERENCES:
patent: 4498121 (1985-02-01), Breedis
patent: 5455195 (1995-10-01), Ramsey et al.
patent: 5658828 (1997-08-01), Lin et al.
patent: 5783868 (1998-07-01), Galloway
patent: 5897369 (1999-04-01), Jun
patent: 5918149 (1999-06-01), Besser et al.
patent: 6057237 (2000-05-01), Ding et al.
patent: 6124203 (2000-09-01), Joo et al.
patent: 6133136 (2000-10-01), Edelstein et al.
patent: 6150272 (2000-11-01), Liu et al.
patent: 6187680 (2001-02-01), Costrini et al.
patent: 6191023 (2001-02-01), Chen
patent: 6229221 (2001-05-01), Kloen et al.
patent: 6258710 (2001-07-01), Rathore et al.
patent: 6312830 (2001-11-01), Li et al.
patent: 6320263 (2001-11-01), Lopatin et al.
patent: 6346745 (2002-02-01), Nogami et al.
patent: 6350667 (2002-02-01), Chen et al.
patent: 6359328 (2002-03-01), Dubin
patent: 6376353 (2002-04-01), Zhou et al.
patent: 6560862 (2003-05-01), Chen
patent: 6569752 (2003-05-01), Homma et al.
patent: 2001/0009804 (2001-07-01), Maekawa
patent: 2001/0036716 (2001-11-01), Chittipeddi et al.
patent: 2002/0005582 (2002-01-01), Nogami et al.
patent: 2002/0046874 (2002-04-01), Cabral et al.
patent: 2002/0053746 (2002-05-01), Stamper et al.
patent: 63-128648 (1988-01-01), None
patent: 8-17913 (1996-01-01), None
patent: 8-124925 (1996-05-01), None
patent: 10-313054 (1998-11-01), None
patent: 11-111842 (1999-04-01), None
patent: 11-121615 (1999-04-01), None
patent: 11-135630 (1999-05-01), None
patent: 2001015516 (2001-01-01), None
patent: 1999-0040755 (1999-06-01), None

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