Electricity: measuring and testing – Plural – automatically sequential tests
Patent
1987-04-27
1989-01-31
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Plural, automatically sequential tests
324158R, 324158T, 365201, 371 21, G01R 3128, G01R 3100, G11C 700
Patent
active
048018694
ABSTRACT:
A semiconductor-processing defect monitor construction for diagnosing processing-induced defects. The semiconductor-processing defect monitor utilizes an array layout and includes continuity defect monitoring structures and short-circuit defect monitoring structures. Once a defect has been indicated by a testing operation, the array layout associated with the defect monitor can be used quickly to determine the approximate location of the known defect, thereby facilitating prompt visual observation of the known defect and, thus, prompt determination of the appropriate corrective action to be applied before substantial continued manufacturing has occurred.
REFERENCES:
patent: 3249926 (1966-05-01), Ashley
patent: 3983479 (1976-09-01), Lee et al.
patent: 3995215 (1976-11-01), Chu et al.
patent: 4055754 (1977-10-01), Chesley
patent: 4061908 (1977-12-01), de Jonge et al.
patent: 4301535 (1981-11-01), McKenny et al.
patent: 4320507 (1982-03-01), Fukushima et al.
patent: 4393475 (1983-07-01), Kitagawa et al.
patent: 4428068 (1984-01-01), Baba
patent: 4458338 (1984-07-01), Giebel et al.
patent: 4459694 (1984-07-01), Ueno et al.
patent: 4464750 (1984-08-01), Tatematsu
patent: 4466081 (1984-08-01), Masuoka
patent: 4468759 (1984-08-01), Kung et al.
patent: 4471483 (1984-09-01), Chamberlain
patent: 4685086 (1987-08-01), Tran
patent: 4701919 (1987-10-01), Naitoh et al.
IBM Technical Disclosure Bulletin, vol. 17, No. 9, dated 2/75; A. K. Ghatalia and D. R. Thomas, pp. 2577-2578.
IBM Technical Disclosure Bulletin, vol. 20, No. 8, dated 1/78; N. E. Hallas, R. F. Levine and C. H. Scrivner, Jr., pp. 3099-3100.
IBM Technical Disclosure Bulletin, vol. 17, No. 12, dated 5/75; J. C. Cassani and D. R. Thomas, pp. 3539-3540.
Myers et al. "Testing Magnetic Core Planes"; IBM Technical Disclosure Bulletin; vol. 1 No. 2; Aug. 1958; pp. 21-22.
Eisenzopf Reinhard J.
International Business Machines - Corporation
Nguyen Vinh P.
LandOfFree
Semiconductor defect monitor for diagnosing processing-induced d does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor defect monitor for diagnosing processing-induced d, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor defect monitor for diagnosing processing-induced d will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-179376