Fishing – trapping – and vermin destroying
Patent
1996-04-29
1997-10-14
Niebling, John
Fishing, trapping, and vermin destroying
437192, 437190, H01L 21283
Patent
active
056772386
ABSTRACT:
A method for fabricating an improved connection between active device regions in silicon, to an overlying metallization level, has been developed. The method produces contacts with superior and improved barrier integrity, which permits silicon device exposure to extended thermal process times and/or higher temperature processes without metal penetration into the silicon contact junction regions. The critical element is the addition of a conformal CVD tungsten layer in the multilayer barrier structure.
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R.C. Ellwanger, et al. "An Integrated Aluminum/CVD-W Metallization Process . . . " Proc. 8th International IEEE VLSI Multilevel Interconnect. Conf. (Jun. 1991).
Chan Lap
Gn Fang Hong
Ramamoorthy Sekar
Wei Che-Chia
Chartered Semiconductor Manufacturing PTE LTD
Everhart C.
Niebling John
Saile George O.
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